Patent Application
Provisional
App. No. 62/684,820
· Confirmation No. 3899
Radical Output Monitor for a Remote Plasma Source and Method of Use
Applicant:
MKS Instruments Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2018-06-18 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-06-14 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2018-06-14 | ADS |
Application Data Sheet | 8 | View | |
| 2018-06-14 | SPEC |
Specification | 9 | View | |
| 2018-06-14 | CLM |
Claims | 2 | View | |
| 2018-06-14 | DRW.NONBW |
Drawings-other than black and white line drawings | 10 | View | |
| 2018-06-14 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2018-06-14 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-06-14 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2018-06-14 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 45134
- Docket No.
- 0201-800WIL-18P
- Confirmation No.
- 3899
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/684,820
- Filed
- 2018-06-14
External Links