Patent Application
Provisional
App. No. 62/685,608
· Confirmation No. 7080
METHODS AND APPARATUS FOR POST EXPOSURE BAKE PROCESSING OF A WORKPIECE
Inventor:
Michael X. Yang
Applicant:
Mattson Technology, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2018-06-19 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-06-15 | PA.. |
Power of Attorney | 2 | View | |
| 2018-06-15 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2018-06-15 | ADS |
Application Data Sheet | 8 | View | |
| 2018-06-15 | SPEC |
Specification | 15 | View | |
| 2018-06-15 | CLM |
Claims | 3 | View | |
| 2018-06-15 | ABST |
Abstract | 1 | View | |
| 2018-06-15 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2018-06-15 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-06-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2018-06-15 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Michael X. Yang
Palo Alto, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-292-P
- Confirmation No.
- 7080
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/685,608
- Filed
- 2018-06-15
External Links