Patent Application
Provisional
App. No. 62/861,543
· Confirmation No. 3190
SUBSTRATE PROCESS APPARATUS
Applicant:
BROOKS AUTOMATION, INC.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-06-20 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-06-14 | SPEC |
Specification | 87 | View | |
| 2019-06-14 | ADS |
Application Data Sheet | 9 | View | |
| 2019-06-14 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-06-14 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2019-06-14 | DRW |
Drawings-only black and white line drawings | 29 | View |
Inventors
Alexander Krupyshev
Chelmsford, MA
Leigh Sharrock
Londonderry, NH
Daniel Babbs
Austin, TX
Robert May
Austin, TX
Attorneys & Agents of Record
Prosecution
- Customer No.
- 106446
- Docket No.
- 390P015777-US(-#1)
- Confirmation No.
- 3190
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/861,543
- Filed
- 2019-06-14
External Links