Patent Application
Provisional
App. No. 62/880,247
· Confirmation No. 6622
METHODS AND APPARATUS FOR SUBSTRATE WARPAGE CORRECTION
Inventors:
Qi Jie Peng, Prayudi Lianto, Chin Wei Tan, Sriskantharajah Thirunavukarasu, Arvind Sundarrajan, Jun-Liang Su, Fang Jie Lim, Manorajh Arunakiri, Wei Jie Dickson Teo, Karrthik Parathithasan, PUAY HAN TAN
Applicant:
APPLIED MATERIALS, INC.
Provisional Application Expired
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-08-06 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-07-30 | PA.. |
Power of Attorney | 2 | View | |
| 2019-07-30 | SPEC |
Specification | 17 | View | |
| 2019-07-30 | CLM |
Claims | 5 | View | |
| 2019-07-30 | ABST |
Abstract | 1 | View | |
| 2019-07-30 | ADS |
Application Data Sheet | 12 | View | |
| 2019-07-30 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-07-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2019-07-30 | DRW |
Drawings-only black and white line drawings | 9 | View |
Inventors
Qi Jie Peng
Singapore, SINGAPORE
Prayudi Lianto
SINGAPORE, SINGAPORE
Chin Wei Tan
SINGAPORE, SINGAPORE
Sriskantharajah Thirunavukarasu
SINGAPORE, SINGAPORE
Arvind Sundarrajan
SINGAPORE, SINGAPORE
Jun-Liang Su
Singapore, SINGAPORE
Fang Jie Lim
Singapore, SINGAPORE
Manorajh Arunakiri
SINGAPORE, SINGAPORE
Wei Jie Dickson Teo
SINGAPORE, SINGAPORE
Karrthik Parathithasan
Singapore, SINGAPORE
PUAY HAN TAN
Singapore, SINGAPORE
Attorneys & Agents of Record
Prosecution
- Customer No.
- 55649
- Docket No.
- 44017075US1
- Confirmation No.
- 6622
No recorded assignments were found for this patent.
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 62/880,247
- Filed
- 2019-07-30
External Links