Patent Application
Provisional
App. No. 62/942,544
· Confirmation No. 7488
SUBSTRATE PROCESSING APPARATUS
Applicant:
Brooks Automation, Inc.
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-12-16 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-12-02 | ADS |
Application Data Sheet | 9 | View | |
| 2019-12-02 | SPEC |
Specification | 121 | View | |
| 2019-12-02 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-12-02 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2019-12-02 | DRW |
Drawings-only black and white line drawings | 36 | View |
Inventors
Alexander Krupyshev
Chelmsford, MA
Joseph Hallisey
Pepperell, MA
Kevin BOURBEAU
Chelmsford, MA
Emilien Audebrand
Chelmsford, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 106446
- Docket No.
- 390P015826-US(-#2)
- Confirmation No.
- 7488
Child
Claims priority from a provisional application
→
App. 17/108,530
· US 11,569,111
Filed 2020-12-01
· Patented Case
Child
Claims priority from a provisional application
→
App. 18/161,583
Filed 2023-01-30
· Abandoned -- Failure to Respond to an Office Action
Child
PCT
Claims priority from a provisional application
→
PCT/US2020/062858
Filed 2020-12-02
· PCT - International Search Report Mailed to IB
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/942,544
- Filed
- 2019-12-02
External Links