Patent Application
Provisional
App. No. 63/019,755
· Confirmation No. 2129
XBAR FRONTSIDE ETCH PROCESS USING POLYSILICON SACRIFICIAL LAYER
Applicant:
Resonant Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2020-05-12 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2020-05-04 | ADS |
Application Data Sheet | 8 | View | |
| 2020-05-04 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2020-05-04 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2020-05-04 | SPEC |
Specification | 1 | View | |
| 2020-05-04 | CLM |
Claims | 1 | View | |
| 2020-05-04 | SPEC |
Specification | 6 | View |
Inventors
Patrick Turner
San Bruno, CA
Ryo Wakabayashi
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 33356
- Docket No.
- R039.P20774
- Confirmation No.
- 2129
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/019,755
- Filed
- 2020-05-04
External Links