IP Library › Patent Application 63030684
Patent Application Provisional Small
App. No. 63/030,684 · Confirmation No. 4483

LOW-TEMPERATURE REMOTE-PLASMA-ACTIVATED VAPOR DEPOSITION ROUTE TO SI-BASED THIN FILMS FROM N-ALKYL SUBSTITUTED PERHYDRIDOCYCLOTRISILAZANES

Provisional Application Expired
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 Code Description Pages PDF
2020-06-08 APP.FILE.REC Filing Receipt 3 View
2020-05-27 PA.. Power of Attorney 2 View
2020-05-27 ADS Application Data Sheet 8 View
2020-05-27 WFEE Fee Worksheet (SB06) 2 View
2020-05-27 N417 Electronic Filing System Acknowledgment Receipt 3 View
2020-05-27 ABST Abstract 1 View
2020-05-27 SPEC Specification 14 View
2020-05-27 DRW Drawings-only black and white line drawings 9 View
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Quick Facts
App. No.
63/030,684
Filed
2020-05-27