IP Library › Patent Application 63071747
Patent Application Provisional Small
App. No. 63/071,747 · Confirmation No. 7137

SYSTEMS AND METHODS FOR SUPPLYING AN ETCHANT IN A GASEOUS STATE DURING EPITAXIAL LIFT-OFF (ELO) PROCESSING

Applicant: Utica Leaseco, LLC
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2020-09-08 APP.FILE.REC Filing Receipt 3 View
2020-08-28 PA.. Power of Attorney 2 View
2020-08-28 DRW Drawings-only black and white line drawings 5 View
2020-08-28 ABST Abstract 1 View
2020-08-28 CLM Claims 3 View
2020-08-28 SPEC Specification 8 View
2020-08-28 WFEE Fee Worksheet (SB06) 2 View
2020-08-28 N417 Electronic Filing System Acknowledgment Receipt 3 View
2020-08-28 ADS Application Data Sheet 9 View
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Quick Facts
App. No.
63/071,747
Filed
2020-08-28