Patent Application
Provisional
Small
App. No. 63/149,733
· Confirmation No. 7971
SONICATED CHEMICAL-MECHANICAL PLANARIZATION (CMP)
Provisional Application Expired
Inventors
Ara Philipossian
Tucson, AZ
Yasa Sampurno
Tucson, AZ
Jason Keleher
Naperville, IL
Katherine Wortman-Otto
Minneapolis, MN
Abigail Linhart
Harvard, IL
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23123
- Docket No.
- 00184.0011US01
- Confirmation No.
- 7971
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/149,733
- Filed
- 2021-02-16
External Links