IP Library Patent Application 63150683
Patent Application Provisional Small
App. No. 63/150,683 · Confirmation No. 8478

LIGHT ENHANCED CHEMICAL-MECHANICAL PLANARIZATION (CMP)

Provisional Application Expired
⬇ PDF
Code Description Pages PDF
2021-05-26 APP.FILE.REC Filing Receipt 3 View
2021-02-18 SPEC Specification 5 View
2021-02-18 TR.PROV Provisional Cover Sheet (SB16) 4 View
2021-02-18 WFEE Fee Worksheet (SB06) 2 View
2021-02-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
63/150,683
Filed
2021-02-18