IP Library › Patent Application 63154414
Patent Application Provisional
App. No. 63/154,414 · Confirmation No. 5918

Solids Vaporizer

Applicant: Entegris, Inc.
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2021-03-29 APP.FILE.REC Filing Receipt 3 View
2021-02-26 SPEC Specification 19 View
2021-02-26 CLM Claims 4 View
2021-02-26 ABST Abstract 1 View
2021-02-26 ADS Application Data Sheet 8 View
2021-02-26 DRW Drawings-only black and white line drawings 3 View
2021-02-26 WFEE Fee Worksheet (SB06) 2 View
2021-02-26 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
63/154,414
Filed
2021-02-26