REAL-TIME PAD-LEVEL SLURRY EFFLUENT EXTRACTION SYSTEM FOR CMP PROCESSES

Inventors: Ara Philipossian, Yasa Sampurno, Jason Keleher

Provisional Application Expired

	Code	Description	Pages	PDF
2021-05-19	`APP.FILE.REC`	Filing Receipt	3	View
2021-05-10	`SPEC`	Specification	5	View
2021-05-10	`TR.PROV`	Provisional Cover Sheet (SB16)	3	View
2021-05-10	`WFEE`	Fee Worksheet (SB06)	2	View
2021-05-10	`N417`	Electronic Filing System Acknowledgment Receipt	2	View

Inventors

Ara Philipossian Tucson, AZ

Yasa Sampurno Tucson, AZ

Jason Keleher Naperville, IL

Attorneys & Agents of Record

ALBERT SCHMEISER Reg. 30681 Attorney · SCHMEISER, OLSEN & WATTS LLP

LORI CUOMO Reg. 34527 Attorney · SCHMEISER, OLSEN & WATTS LLP

ARLEN OLSEN Reg. 37543 Attorney · SCHMEISER, OLSEN & WATTS, LLP

WILLIAM ANDERSON Reg. 41585 Attorney · GRANT ANDERSON LLP

JACK FRIEDMAN Reg. 44688 Attorney · SCHMEISER, OLSEN & WATTS LLP

JEFFREY JOHNSON Reg. 53077 Agent

PETER MIKESELL Reg. 54311 Agent · SCHMEISER, OLSEN & WATTS, LLP

TIMOTHY COLLINS Reg. 58037 Attorney · SCHMEISER, OLSEN & WATTS LLP

KAREN JACHIMOWICZ Reg. 63694 Agent

SEAN ENOS Reg. 69468 Attorney · SCHMEISER, OLSEN & WATTS, LLP

PETER CUOMO Reg. 81531 Agent

Prosecution

No recorded assignments were found for this patent.

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