IP Library › Patent Application 63188054
Patent Application Provisional Small
App. No. 63/188,054 · Confirmation No. 1162

SECOND-HARMONIC GENERATION FOR CRITICAL DIMENSIONAL METROLOGY

Inventor: David L. Adler
Applicant: FemtoMetrix, Inc.
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2021-05-21 APP.FILE.REC Filing Receipt 3 View
2021-05-13 ADS Application Data Sheet 8 View
2021-05-13 DRW Drawings-only black and white line drawings 10 View
2021-05-13 WFEE Fee Worksheet (SB06) 2 View
2021-05-13 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-05-13 ABST Abstract 1 View
2021-05-13 SPEC Specification 12 View
2021-05-13 CLM Claims 13 View
2021-05-13 APPENDIX Appendix to the specification 49 View
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Quick Facts
App. No.
63/188,054
Filed
2021-05-13