IP Library › Patent Application 63188305
Patent Application Provisional Small
App. No. 63/188,305 · Confirmation No. 5482

SILICON CARBIDE (SIC) WAFER POLISHING WITH NOVEL SLURRY FORMULATIONS AND PROCESSES

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2021-05-21 APP.FILE.REC Filing Receipt 3 View
2021-05-13 TR.PROV Provisional Cover Sheet (SB16) 4 View
2021-05-13 SPEC Specification 5 View
2021-05-13 WFEE Fee Worksheet (SB06) 2 View
2021-05-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
63/188,305
Filed
2021-05-13