IP Library › Patent Application 63240156
Patent Application Provisional
App. No. 63/240,156 · Confirmation No. 6976

Methods and Apparatus for Processing an Electrostatic Chuck

Applicant: Entegris, Inc.
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2022-08-24 ADS Application Data Sheet 10 View
2022-08-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-08-23 R48.REQ.G Acceptance of Request under Rule 48 to correct inventorship or name 1 View
2022-08-23 APP.FILE.REC Filing Receipt 3 View
2022-08-19 R48.REQ Request under Rule 48 correcting inventorship 3 View
2022-08-19 ADS Application Data Sheet 10 View
2022-08-19 WFEE Fee Worksheet (SB06) 2 View
2022-08-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-09-13 APP.FILE.REC Filing Receipt 3 View
2021-09-02 PA.. Power of Attorney 1 View
2021-09-02 TRAN.LET Transmittal Letter 2 View
2021-09-02 WFEE Fee Worksheet (SB06) 2 View
2021-09-02 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-09-02 TR.PROV Provisional Cover Sheet (SB16) 3 View
2021-09-02 ADS Application Data Sheet 10 View
2021-09-02 SPEC Specification 24 View
2021-09-02 CLM Claims 6 View
2021-09-02 ABST Abstract 1 View
2021-09-02 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
App. No.
63/240,156
Filed
2021-09-02