Patent Application
Provisional
App. No. 63/389,212
· Confirmation No. 5102
PHOTOACTIVE COMPOUNDS, PHOTORESIST COMPOSITIONS INCLUDING THE SAME, AND PATTERN FORMATION METHODS
Applicant:
ROHM AND HAAS ELECTRONIC MATERIALS LLC
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2022-07-25 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2022-07-14 | ADS |
Application Data Sheet | 10 | View | |
| 2022-07-14 | SPEC |
Specification | 38 | View | |
| 2022-07-14 | CLM |
Claims | 3 | View | |
| 2022-07-14 | ABST |
Abstract | 1 | View | |
| 2022-07-14 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2022-07-14 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Emad Aqad
Northborough, MA
Tomas Marangoni
Marlborough, MA
Yinjie Cen
Shrewsbury, MA
Paul J. LaBeaume
Auburn, MA
Mingqi Li
Shrewsbury, MA
James F. Cameron
Brookline, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 158376
- Docket No.
- DI83615-US-PSP/DPN11123US
- Confirmation No.
- 5102
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/389,212
- Filed
- 2022-07-14
External Links