Patent Application
Provisional
App. No. 63/591,580
· Confirmation No. 5203
PROCESS GAS DELIVERY CONTROL SYSTEM WITH CONCENTRATION MONITORING
Applicant:
MKS Instruments, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2023-10-31 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2023-10-31 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2023-10-19 | APP.TEXT |
Application body structured text document | — | View | |
| 2023-10-19 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2023-10-19 | ADS |
Application Data Sheet | 5 | View | |
| 2023-10-19 | SPEC |
Specification | 11 | View | |
| 2023-10-19 | CLM |
Claims | 1 | View | |
| 2023-10-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2023-10-19 | N417.PYMT |
Electronic Fee Payment | 2 | View |
Inventors
Junhua Ding
Andover, MA
Hongke Ye
Andover, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 45134
- Docket No.
- E329-P1
- Confirmation No.
- 5203
SECURITY INTEREST
Recorded 2024-01-24
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2023-10-25
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Quick Facts
- App. No.
- 63/591,580
- Filed
- 2023-10-19
External Links