Patent Application
Provisional
App. No. 63/621,212
· Confirmation No. 4214
LOW RESISTIVITY TUNGSTEN INTERCONNECT STRUCTURES
Applicant:
VEECO INSTRUMENTS INC.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2024-01-30 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2024-01-30 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2024-01-16 | SPEC |
Specification | — | View | |
| 2024-01-16 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2024-01-16 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2024-01-16 | ADS |
Application Data Sheet | 9 | View | |
| 2024-01-16 | PA.. |
Power of Attorney | 2 | View | |
| 2024-01-16 | SPEC |
Specification | 19 | View | |
| 2024-01-16 | CLM |
Claims | 5 | View | |
| 2024-01-16 | ABST |
Abstract | 1 | View | |
| 2024-01-16 | DRW |
Drawings-only black and white line drawings | 10 | View |
Inventors
Rutvik J. MEHTA
Plainview, NY
Yuejing WANG
Plainview, NY
Robert CALDWELL
Plainview, NY
Frank CERIO
Plainview, NY
Attorneys & Agents of Record
Prosecution
- Customer No.
- 16275
- Docket No.
- 579015PRV
- Confirmation No.
- 4214
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/621,212
- Filed
- 2024-01-16
External Links