Thin film transistor and method for manufacturing a display panel
View Patent ↗Embodiments of the present invention relate to a thin film transistor and a manufacturing method of a display panel, and include forming a gate line including a gate electrode on a substrate, forming a gate insulating layer on the gate electrode, forming an intrinsic semiconductor on the gate insulating layer, forming an extrinsic semiconductor on the intrinsic semiconductor, forming a data line including a source electrode and a drain electrode on the extrinsic semiconductor, and plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode to form a protection member and ohmic contacts on respective sides of the protection member. Accordingly, the process for etching the extrinsic semiconductor and forming an inorganic insulating layer for protecting the intrinsic semiconductor may be omitted such that the manufacturing process of the display panel may be simplified, manufacturing cost may be reduced, and productivity may be improved.
1. A thin film transistor comprising:
a gate electrode;
a semiconductor on the gate electrode;
a source electrode on the semiconductor;
a drain electrode disposed at a distance from the source electrode;
ohmic contacts including a first portion disposed between the semiconductor and the source electrode and a second portion disposed between the semiconductor and the drain electrode;
a protection member connected between the first portion and the second portion of the ohmic contacts, the protection member comprising a portion of same conductive impurity as the ohmic contacts.
2. The thin film transistor of claim 1 , wherein
the protection member comprises an insulator.
3. The thin film transistor of claim 1 , wherein
the insulator comprises a silicon oxide or a silicon nitride.
4. The thin film transistor of claim 1 , further comprising
a color filter formed on the protection member, the color filter contacting the protection member.
5. The thin film transistor of claim 4 , further comprising
a capping layer formed on the color filter.
6. The thin film transistor of claim 5 , wherein
a sum planar shape of the ohmic contacts and the protection member is substantially the same as a planar shape of the semiconductor.
7. The thin film transistor of claim 1 , wherein
the protecting member is corresponding to the gate electrode.
8. The thin film transistor of claim 1 , wherein
the protection member is expanded in a depth direction to the gate electrode consuming a portion of the top surface of the semiconductor.
9. The thin film transistor of claim 8 , wherein
the protection member comprises an upper portion with the impurity and a lower portion without impurity.