Process for fabricating piezoelectric element
View Patent ↗In a production method of a piezoelectric element, an unneeded electric field is prevented from being applied to a piezoelectric thin film layer during the production process, resulting in a high performance piezoelectric element production method. The production method includes a first process for depositing an under electrode layer, a piezoelectric thin film layer and an upper electrode layer successively on a substrate such that the under electrode layer and the upper electrode layer form a short-circuit, a second process, after the first process, for etching including dry etching, the second process commenced while the under electrode layer and the upper electrode layer are short-circuited, a third process, after the second process, for polarizing by applying a voltage across the under electrode layer and the upper electrode layer, a fourth process, after the third process, for individualizing each piezoelectric element.
1. A production method of a piezoelectric element comprising:
a first process for depositing an under electrode layer, a piezoelectric thin film layer and an upper electrode layer successively on a substrate such that the under electrode layer and the upper electrode layer form a short-circuit;
a second process, after the first process, for etching including dry etching, the second process commenced while the under electrode layer and the upper electrode layer are short-circuited;
a third process, after the second process, for polarizing by applying a voltage across the under electrode layer and the upper electrode layer; and
a fourth process, after the third process, for individualizing the element into independent units.
2. The production method of the piezoelectric element according to claim 1 , wherein the first process includes a process for short-circuiting the under electrode layer and the upper electrode layer by depositing the upper electrode layer.
3. The production method of the piezoelectric element according to claim 2 , wherein the first process includes a process for short-circuiting the upper electrode layer and under electrode layer by making a dimension of the piezoelectric thin film layer smaller than that of the under electrode layer and a dimension of the upper electrode layer larger than that of the piezoelectric thin film layer.
4. The production method of the piezoelectric element according to claim 1 , wherein the first process includes a process for short-circuiting the under electrode layer and the upper electrode layer with a conductive adhesive.
5. The production method of the piezoelectric element according to claim 1 , wherein the first process includes a process for short-circuiting the under electrode layer and the upper electrode layer with a wire bonding.
6. The production method of the piezoelectric element according to claim 1 , wherein the first process includes a process for short-circuiting the under electrode layer and the upper electrode layer with a conductive tape.
7. The production method of the piezoelectric element according to claim 1 , wherein the second process includes dry etching for shaping the piezoelectric element and then wet etching for breaking the short-circuit portion between the under electrode layer and the upper electrode layer.
8. The production method of the piezoelectric element according to claim 1 , wherein the third process includes breaking short-circuit portion between the under electrode layer and the upper electrode layer before the polarizing process starts.
9. The production method of the piezoelectric element according to claim 1 , wherein the third process includes a process for short-circuiting again the upper electrode layer and the under electrode layer after the polarizing process is finished, and
the fourth process includes a process for breaking the short-circuit portion between the under electrode layer and the upper electrode layer after dry etching process.