Semiconductor device having a control circuit and method of its manufacture
View Patent ↗A semiconductor has an IGBT active section and a control circuit section for detecting an IGBT abnormal state. A collector region is formed on the back surface side (i.e., on the IGBT collector side) in a selective manner, namely right under the IGBT active section.
1. A semiconductor device comprising:
a semiconductor substrate of a first-conductivity type having a one major surface and an opposite major surface opposite the one major surface;
an IGBT section comprising:
an active section on a side of the one major surface of the semiconductor substrate, including a gate electrode and an emitter electrode;
a breakdown-resistant structure surrounding the active section;
a collector region of a second-conductivity type on a side of the opposite major surface of the semiconductor substrate; and
a collector electrode in contact with the opposite major surface of the semiconductor substrate;
a first high-concentration region of the first-conductivity type in the one major surface of the semiconductor substrate, outside the breakdown-resistant structure, and higher in impurity concentration than the semiconductor substrate;
a Zener diode connected to the high-concentration region and the gate electrode, with an anode of the Zener diode connected to the gate electrode;
a control circuit section disposed inside the breakdown-resistant structure on the side of the one major surface of the semiconductor substrate; and
a well region of the second-conductivity type in the one major surface of the semiconductor substrate and surrounding the control circuit section;
wherein the well region connects to the emitter electrode of the IGBT section,
wherein the control circuit protects the IGBT section by detecting an abnormal state of the IGBT section through the emitter electrode and controls a gate voltage of the IGBT section,
wherein the collector region is in the opposite major surface of the semiconductor substrate positioned underneath the active section; and
wherein the collector region is not positioned vertically underneath the control circuit section.
2. The semiconductor device according to claim 1 , further comprising a buffer region of the first-conductivity type positioned between the collector region and the active region, and having a higher impurity concentration than the semiconductor substrate.
3. The semiconductor device according to claim 1 , wherein a depth of the collector region is about 1 μm.
4. The semiconductor device according to claim 2 , wherein a depth of the collector region is about 1 μm.
5. The semiconductor device having a control circuit according to claim 1 , further comprising a second high-concentration region of the first-conductivity type adjacent to the collector region and having a higher impurity concentration than the semiconductor substrate.
6. The semiconductor device having a control circuit according to claim 2 , further comprising a second high-concentration region of the first-conductivity type adjacent to the collector region and having a higher impurity concentration than the semiconductor substrate.
7. The semiconductor device having a control circuit according to claim 5 , further comprising an intermediate-concentration layer of the first-conductivity type on the side of the opposite major surface extending deeper into the opposite major surface than the collector region and the second high-concentration region, wherein the intermediate-concentration layer has impurity concentration between those of the semiconductor substrate and the second high-concentration region.
8. The semiconductor device having a control circuit according to claim 5 , wherein a depth of the collector region is about 1 μm.
9. The semiconductor device having a control circuit according to claim 6 , wherein a depth of the collector region is about 1 μm.
10. The semiconductor device according to claim 1 , wherein collector region extends also underneath the breakdown-resistant structure.
11. The semiconductor device according to claim 5 , wherein the second high-concentration region is also positioned underneath the control circuit section.
12. The semiconductor device according to claim 6 , wherein the second high-concentration region is also positioned underneath the control circuit section.
13. The semiconductor device according to claim 11 , further comprising a third high-concentration region of the first-conductivity type adjacent to the collector region and positioned underneath the breakdown-resistant structure.
14. The semiconductor device according to claim 12 , further comprising a third high-concentration region of the first-conductivity type adjacent to the collector region and positioned underneath the breakdown-resistant structure.
15. The semiconductor device according to claim 1 , wherein the active section includes a base region of the second-conductivity type in the one major surface of the semiconductor substrate, an emitter region of the first-conductivity type in a surface region of the base region, with the emitter electrode in contact with both the emitter region and the base region, and with the gate electrode over a portion of the base region located between the emitter region and a portion of one major surface of the semiconductor substrate adjacent to the base region, with a gate insulating film interposed in between.
16. The semiconductor device according to claim 1 , wherein a predetermined thickness of the semiconductor substrate ranges inclusive between 70-120 μm.
17. The semiconductor device according to claim 16 , wherein the semiconductor substrate is an FZ or CZ substrate.