Method for sealing a quartz crystal device
View Patent ↗A quartz crystal device includes a crystal resonator element and a package including a plurality of components. The plurality of components are bonded using a metal paste sealing material containing a metallic particle having an average particle size from 0.1 to 1.0 μm, an organic solvent, and a resin material in proportions of from 88 to 93 percent by weight from 5 to 15 percent by weight, and from 0.01 to 4.0 percent by weight, respectively, to hermetically seal the crystal resonator element in the package.
1. A method for sealing a quartz crystal device, in order to bond an upper substrate and a lower substrate with upper and lower surfaces, respectively, of an intermediate crystal plate in which a crystal resonator element and an outer frame are integrally connected to hermetically seal the crystal resonator element in a cavity defined between the upper substrate and the lower substrate, the method comprising:
(a) applying a metallic thin film on each of upper and lower surfaces of the outer frame of the intermediate crystal plate, and a metallic thin film on a surface to be bonded with the outer frame of each of the upper substrate and the lower substrate;
(b) applying a metal paste sealing material including an organic solvent and metallic particles to at least one of the metallic thin film on the upper surface of the outer frame and the metallic thin film of the upper substrate, and heating the metal paste sealing material to evaporate substantially all the organic solvent to form a primary sintered body having a porous structure with a Young's modulus of 9 to 16 GPa and a density of 10 to 17 g/cm 3 ,
wherein the metallic particles of the metal paste sealing material each have an average particle size from 0.1 to 1.0 μm, and the metal paste sealing material comprises the metallic particles in a proportion of from 88 to 93 percent by weight of the metal paste sealing material, the organic solvent in a proportion of from 5 to 15 percent by weight of the metal paste sealing material, and a resin material in a proportion of from 0.01 to 4.0 percent by weight of the metal paste sealing material, to hermetically seal the crystal resonator element;
(c) applying the metal paste sealing material to at least one of the metallic thin film on the lower surface of the outer frame and the metallic thin film of the lower substrate, and heating the metal paste sealing material to evaporate substantially all the organic solvent to form a primary sintered body having a porous structure with a Young's modulus of 9 to 16 GPa and a density of 10 to 17 g/cm 3 ;
(d) placing the intermediate crystal plate and the upper substrate adjacent to each other while bringing one of the metallic thin films having the primary sintered bodies formed thereon into contact with the other of the metallic thin films, and applying pressure to the primary sintered bodies to densely recrystallize the metallic particles thereof to hermetically bond the intermediate crystal plate and the upper substrate in the outer frame; and
(e) placing the intermediate crystal plate and the lower substrate adjacent to each other while bringing one of the metallic thin films having the primary sintered bodies formed thereon into contact with the other of the metallic thin films, and applying pressure to the primary sintered bodies to densely recrystallize the metallic particles thereof to hermetically bond the intermediate crystal plate and the lower substrate in the outer frame.
2. The method for sealing a quartz crystal device according to claim 1 , the upper substrate and the lower substrate being made of quartz crystal.
3. The method for sealing a quartz crystal device according to claim 1 ,
the upper substrate being made of a silicon material and including an integrated circuit that drives the crystal resonator element and a terminal coupled to the integrated circuit;
the intermediate crystal plate having a terminal to be coupled to the terminal of the upper substrate on the upper surface of the outer frame; and
in the step (d), in placing the intermediate crystal plate and the upper substrate on top of each other, the terminal of the upper substrate being directly coupled with the terminal of the intermediate crystal plate with a conductive coupling material.
4. The method for sealing a quartz crystal device according to claim 1 , the steps (d) and (e) being such that heating is simultaneous with applying pressure.
5. The method for sealing a quartz crystal device according to claim 1 ,
the heating of the metal paste sealing material being carried out at a temperature between 200° C. and 350° C., inclusive.
6. The method for sealing a quartz crystal device according to claim 1 ,
the metal paste sealing material being heated for a time period between 10 to 30 minutes, inclusive.
7. The method for sealing a quartz crystal device according to claim 1 , the metallic particles of the metal paste sealing material being made of at least one of: Au, Ag, Pt, and Pd.