Micro-fluid ejection heads with multiple glass layers
View Patent ↗Methods for fabricating micro-fluid ejection heads and micro-fluid ejection heads are provided herein, such as those that use non-conventional substrates. One such micro-fluid ejection head includes a substrate having first and second glass layers disposed adjacent to a surface thereof and a plurality of fluid ejection actuators disposed adjacent to the second glass layer. The first glass layer is thicker than the second glass layer and the second glass layer has a surface roughness of no greater than about 75 Å Ra.
1. A micro-fluid ejection head, comprising:
a substantially alumina substrate having first and second glass layers disposed adjacent to a surface thereof and a plurality of fluid ejection actuators disposed above and adjacent to the second glass layer, wherein the first glass layer is thicker than the second glass layer and the second glass layer has a surface roughness of no greater than about 75 Å average roughness.
2. The micro-fluid ejection head of claim 1 , wherein the fluid ejection actuators comprise resistors.
3. The micro-fluid ejection head of claim 1 , wherein the substrate is a unitary substrate having a dimension in one direction of greater than about 2.5 centimeters.
4. The micro-fluid ejection head of claim 1 , wherein the first glass layer has a thickness of between about 10 and about 40 μm, and the second glass layer has a thickness of between about 1 and about 3 μm.
5. The micro-fluid ejection head of claim 1 , wherein the first and second glass layers are made of boro-phospho-silicate glass.