Contour resonator
View Patent ↗A contour resonator reducing fluctuation of resonance frequency due to variety of a film thickness of an excitation electrode is provided. A counter resonator includes a quartz substrate and excitation electrodes respectively formed on front and back surfaces of the quartz substrate. There is a range where a frequency sensitivity with respect to an electrode film thickness is smaller than that in related art when a ratio Fe/Fb between a contour vibration frequency Fe of the excitation electrodes and a contour vibration frequency Fb of the substrate is larger than 0.69. That is, fluctuation of the contour vibration frequency with respect to variety of the electrode film thickness can be made small substantially.
1. A contour resonator, comprising:
a substrate; and
an excitation electrode provided on each of front and back surfaces of the substrate, wherein
a ratio Fe/Fb between a contour vibration frequency Fe of the excitation electrode and a contour vibration frequency Fb of the substrate satisfies Fe/Fb>0.69.
2. The contour resonator according to claim 1 , wherein
the ratio Fe/Fb between the contour vibration frequency Fe of the excitation electrode and the contour vibration frequency Fb of the substrate is in a range from 0.926 to 1.086.