Semiconductor device and manufacturing method thereof
View Patent ↗In order that a top surface of a gate electrode does not have sharp portions, ends of the top surface of the gate electrode are rounded before refractory metal is deposited for silicidation. This reduces intensive application of film stresses which are generated in heat treatment, enabling formation of a silicide layer with a uniform, sufficient thickness.
1. A semiconductor device, comprising:
a substrate;
a gate electrode formed on the substrate and extending in a prescribed direction;
a sidewall formed on a side surface of the gate electrode; and
source/drain regions disposed outside the sidewall, wherein
the gate electrode has a first silicide layer at its top surface,
a bottom surface of the first silicide layer has an approximately circular arc shape downward from a side end of the first silicide layer toward the center direction and a top surface of the first silicide layer has an approximately circular arc shape upward from a side end of the first silicide layer toward the center direction, and
a second silicide layer is formed in the source/drain regions are provided with, and
a top surface of the second silicide layer in the source/drain regions is located higher than a top surface of the substrate on which the sidewall is formed.
2. The semiconductor device according to claim 1 , wherein
a top end of the sidewall is provided between a top surface and a bottom surface of a side surface of the first silicide layer.
3. The semiconductor device according to claim 1 , wherein
in the first silicide layer, a distance between a top end of the sidewall and a top surface of the first silicide layer is substantially the same as a distance between the top end of the sidewall and a bottom surface of the first silicide layer.
4. The semiconductor device according to claim 1 , wherein
a distance between a top end of the sidewall and a top surface of the first silicide layer is larger than 40% or more of a thickness of a central portion of the first sicilide layer.
5. The semiconductor device according to claim 1 , wherein
in a cross section perpendicular to the prescribed direction, a top surface of the first silicide layer has a rounded end, and the rounded end of the top surface of the first sicilide layer has a radius of curvature of 20 nm to 50 nm.
6. The semiconductor device according to claim 1 , wherein
a distance between a top surface of the first silicide layer and a top end of the sidewall is 0 nm to 50 nm.
7. The semiconductor device according to claim 1 , wherein
the first silicide layer includes two layers.
8. The semiconductor device according to claim 1 , wherein
the first silicide layer and the second silicide layer include at least any of nickel and platinum.