Method for fabricating trench gate to prevent on voltage parasetic influences
View Patent ↗A semiconductor-device fabrication method includes forming a second semiconductor region of a second conductivity on a surface layer of a first semiconductor region of a first conductivity, the second semiconductor region having an impurity concentration higher than the first semiconductor region; forming a trench penetrating the second semiconductor region, to the first semiconductor region; embedding a first electrode inside the trench via an insulating film, at a height lower than a surface of the second semiconductor region; forming an interlayer insulating film inside the trench, covering the first electrode; leaving the interlayer insulating film on only a surface of the first electrode; removing the second semiconductor region such that the surface thereof is positioned lower than an interface between the first electrode and the interlayer insulating film; and forming a second electrode contacting the second semiconductor region and adjacent to the first electrode via the insulating film in the trench.
1. A method of fabricating a semiconductor device comprising:
forming a second semiconductor region of a second conductivity type on a surface layer of a first semiconductor region of a first conductivity type, the second semiconductor region having an impurity concentration higher than that of the first semiconductor region;
forming a trench that penetrates the second semiconductor region to reach the first semiconductor region;
embedding a first electrode inside the trench via an insulating film, the first electrode not reaching the same height as a surface of the second semiconductor region;
forming an interlayer insulating film embedded inside the trench to cover the first electrode;
leaving the interlayer insulating film on only a surface of the first electrode;
removing the second semiconductor region such that the surface of the second semiconductor region is positioned lower than an interface between the first electrode and the interlayer insulating film; and
forming a second electrode that has a bottom surface that contacts the second semiconductor region and that has a side surface that contacts said insulating film, the second electrode being adjacent to the first electrode via the insulating film formed on a sidewall of the trench.
2. The method of fabricating a semiconductor device according to claim 1 , further comprising:
forming a third semiconductor region of the second conductivity type on a surface of the first semiconductor region, the third semiconductor region having an impurity concentration higher than that of the first semiconductor region; and
forming a third electrode on a surface of the third semiconductor region.
3. A method of fabricating a semiconductor device comprising:
forming a second semiconductor region of a second conductivity type on a surface layer of a first semiconductor region of a first conductivity type, the second semiconductor region having an impurity concentration higher than that of the first semiconductor region;
forming a trench that penetrates the second semiconductor region to reach the first semiconductor region;
embedding a first electrode inside the trench via an insulating film, the first electrode not reaching the same height as a surface of the second semiconductor region;
forming an interlayer insulating film embedded inside the trench to cover the first electrode;
leaving the interlayer insulating film on only a surface of the first electrode;
removing the second semiconductor region such that the surface of the second semiconductor region is positioned lower than an interface between the first electrode and the interlayer insulating film;
forming a second electrode that contacts the second semiconductor region, the second electrode being adjacent to the first electrode via the insulating film formed on a sidewall of the trench; and
wherein the second electrode is embedded in a recess portion made up of the second semiconductor region and the insulating film formed on the sidewall of the trench.
4. The method of fabricating a semiconductor device according to claim 3 , including forming said recess such as to be delineated by a substantially flat top surface of said second semiconductor region and the insulating film that forms a sidewall that is substantially perpendicular to said top surface of said second semiconductor region.
5. The method of fabricating a semiconductor device according to claim 4 , including forming said substantially flat top surface of said second semiconductor region such as to be substantially parallel to a front surface of a semiconductor substrate of said semiconductor device.
6. The method of fabricating a semiconductor device according to claim 4 , wherein said second electrode is in contact with said substantially flat top surface of said second semiconductor region and said sidewall of said insulating film, whereby forming a channel region in a region of the second semiconductor region adjacent to said first electrode via the insulating film enabling the semiconductor device to be fabricated without forming a source region on a surface layer of the second semiconductor region.
7. The method of fabricating a semiconductor device according to claim 4 , wherein two or more of said semiconductor devices are disposed on a single substrate.
8. A method of fabricating a semiconductor device comprising:
forming a second semiconductor region of a second conductivity type on a surface layer of a first semiconductor region of a first conductivity type, the second semiconductor region having an impurity concentration higher than that of the first semiconductor region;
forming a trench that penetrates the second semiconductor region to reach the first semiconductor region;
embedding a first electrode inside the trench via an insulating film, the first electrode not reaching the same height as a surface of the second semiconductor region;
forming an interlayer insulating film embedded inside the trench to cover the first electrode;
leaving the interlayer insulating film on only a surface of the first electrode;
removing the second semiconductor region such that the surface of the second semiconductor region is positioned lower than an interface between the first electrode and the interlayer insulating film;
forming a second electrode that contacts the second semiconductor region, the second electrode being adjacent to the first electrode via the insulating film formed on a sidewall of the trench; and
wherein the second semiconductor region is removed by etching using the interlayer insulating film as a mask.
9. A method of fabricating a semiconductor device comprising:
forming a second semiconductor region of a second conductivity type on a surface layer of a first semiconductor region of a first conductivity type, the second semiconductor region having an impurity concentration higher than that of the first semiconductor region;
forming a trench that penetrates the second semiconductor region to reach the first semiconductor region;
embedding a first electrode inside the trench via an insulating film, the first electrode not reaching the same height as a surface of the second semiconductor region;
forming an interlayer insulating film embedded inside the trench to cover the first electrode;
leaving the interlayer insulating film on only a surface of the first electrode;
removing the second semiconductor region such that the surface of the second semiconductor region is positioned lower than an interface between the first electrode and the interlayer insulating film;
forming a second electrode that contacts the second semiconductor region, the second electrode being adjacent to the first electrode via the insulating film formed on a sidewall of the trench; and
wherein the second semiconductor region is removed to a depth that is equal to or greater than 0.05 μm and equal to or less than 2 μm from the interface between the first electrode and the interlayer insulating film to the surface of the second semiconductor region.