Passivation film for electronic device and method of manufacturing the same
View Patent ↗Disclosed are a passivation film for an electronic device having a nitride film formed on a substrate by a plasma-enhanced chemical vapor deposition (PECVD) method using a silicon-containing gas and a nitrogen-containing gas and a plasma-processed film formed by plasma processing a surface of the nitride film by a PECVD method using an NH 3 gas, an N 2 gas, and a H 2 gas, and a method of manufacturing the passivation film.
1. A passivation film for an electronic device comprising:
a nitride film formed on a substrate by using a silicon-containing gas and a nitrogen-containing gas, wherein the nitride film has a thickness in a range from about 0.5 to about 1.5 μm; and
a plasma-processed film formed by plasma processing a surface of the nitride film using an NH 3 gas, an N 2 gas, and a H 2 gas.
2. The passivation film of claim 1 , wherein the nitride film comprises at least one of a silicon nitride film and a silicon carbon nitride film.
3. The passivation film of claim 1 , wherein a Si—H bond peak in the plasma-processed film in a 2,200 nm region is reduced.
4. The passivation film of claim 1 , wherein the tensile stress characteristic of the passivation film is increased by the plasma processing.
5. The passivation film of claim 1 , wherein the passivation film has a refractive index of about 70% or more in a visible light region.
6. The passivation film of claim 1 , wherein the plasma-processed film has a thickness in a range from about 0.02 to about 0.8 μm.
7. A passivation film for an electronic device comprising:
a nitride film formed on a substrate by using a silicon-containing gas and a nitrogen-containing gas, wherein the nitride film comprises a first nitride film; and
a plasma-processed film formed by plasma processing a surface of the nitride film using an NH 3 gas, an N 2 gas, and a H 2 gas, wherein the plasma-processed film comprises a first plasma-processed film, and a second nitride film formed by plasma processing a surface of the first plasma-processed film using a silicon-containing gas and a nitrogen-containing gas.
8. The passivation film of claim 7 , further comprising a second plasma-processed film formed by plasma processing a surface of the second nitride film using an NH 3 gas, an N 2 gas, and a H 2 gas and a third nitride film formed by plasma processing a surface of the second plasma-processed film using a silicon-containing gas and a nitrogen-containing gas.
9. A method of manufacturing a passivation film for an electronic device, the method comprising:
forming a nitride film on a substrate by a plasma-enhanced chemical vapor deposition (PECVD) method using a silicon-containing gas and a nitrogen-containing gas, wherein the nitride film has a thickness in a range from about 0.5 to about 1.5 μm; and
plasma processing a surface of the nitride film by a PECVD method using an NH 3 gas, an N 2 gas, and a H 2 gas.
10. The method of claim 9 , wherein the nitride film comprises at least one of a silicon nitride film and a silicon carbon nitride film.
11. The method of claim 9 , wherein the silicon-containing gas in the forming of the nitride film is a SiH 4 gas.
12. The method of claim 9 , wherein the plasma processing is performed under a pressure condition in a range from about 0.1 to about 10 torr.
13. The method of claim 9 , wherein the plasma processing is performed with a radio frequency (RF) power in a range from about 50 to about 1,000 W.
14. The method of claim 9 , wherein the plasma processing is performed at a temperature of the substrate in a range from about 50 to about 200° C.
15. A method of manufacturing passivation film for an electronic device, the method comprising:
forming a nitride film on a substrate by a plasma-enhanced chemical vapor deposition (PECVD) method using a silicon-containing gas and a nitrogen-containing gas;
plasma processing a surface of the nitride film by a PECVD method using an NH 3 gas, an N 2 gas, and a H 2 gas; and
forming a second nitride film on a first plasma-processed film by a PECVD method using a silicon-containing gas and a nitrogen-containing gas.
16. The method of claim 15 , further comprising:
forming a second plasma-processed film by plasma processing a surface of the second nitride film by a PECVD method using an NH 3 gas, an N 2 gas, and a H 2 gas; and
forming a third nitride film on the second plasma-processed film by plasma processing a surface of the second plasma-processed film by a PECVD method using a silicon-containing gas and a nitrogen-containing gas.