Semiconductor device and method for manufacturing semiconductor device
View Patent ↗A method for manufacturing a semiconductor device includes forming a first gate electrode on a semiconductor substrate in a first transistor region; forming a channel dose region; and forming a first source extension region, wherein the channel dose region is formed by using a first mask as a mask and by ion-implanting a first dopant of the first conductivity type, and the first mask covering a drain side of the first gate electrode and covering a drain region, and the first source extension region is formed by using a second mask and the gate electrode as masks and by ion-implanting a second dopant of a second conductivity type that is a conductivity type opposite to the first conductivity type, the second mask covering the drain side of the first gate electrode and covering the drain region.
1. A method for manufacturing a semiconductor device comprising:
forming a first gate electrode on a semiconductor substrate in a first transistor region in which a first transistor of a first conductivity type is to be formed;
forming a channel dose region on the semiconductor substrate, the channel dose region is formed by using a first mask as a mask and by ion-implanting a first dopant of the first conductivity type with acceleration energy that passes through the first gate electrode, the channel dose region having a first depth in a source region of the first transistor and having a second depth under the gate electrode, and the first mask covering a drain side of the first gate electrode and covering a drain region of the first transistor, the second depth being shallower than the first depth;
forming a first source extension region in the semiconductor substrate, the first source extension region is formed by using a second mask and by ion-implanting a second dopant of a second conductivity type that is a conductivity type opposite to the first conductivity type, the second mask covering the drain side of the first gate electrode and covering the drain region;
preparing the semiconductor substrate having a second transistor region in which a second transistor of the first conductivity type is to be formed and having a third transistor region in which a third transistor of the first conductivity type is to be formed;
forming a second gate electrode in the second transistor region; and
forming a third gate electrode in the third transistor region,
wherein the first mask covers the second transistor region and the third transistor region, and the second mask does not cover the second transistor region.
2. The method for manufacturing the semiconductor device according to claim 1 , wherein the first mask and the second mask are the same mask.
3. The method for manufacturing the semiconductor device according to claim 1 , further comprising:
forming a pocket region in the semiconductor substrate, the pocket region is formed by using a third mask and by obliquely ion-implanting a third dopant of the first conductivity type into the third transistor region, the third mask covering the second transistor region and covering the first transistor region, and the third gate electrode being positioned in the third transistor region, and forming a third source extension region in the semiconductor substrate, the third source extension region is formed by using the third mask and by ion-implanting a fourth dopant of the second conductivity type into the third transistor region at a peak position shallower than the pocket region, the third gate electrode being positioned in the third transistor region.
4. The method for manufacturing the semiconductor device according to claim 3 , wherein the ion implantation into the pocket region has a depth that is less than or equal to half a depth of the ion implantation into the channel dose region and has a dose amount that is greater than or equal to five times a dose amount of the ion implantation into the channel dose region.