Light-emitting diode fabrication method
A LED fabrication method includes: providing a substrate; forming a low-temperature Al x Ga 1-x N (0≦x≦1) layer over the growth substrate; setting the growth pressure from high to low and temperature and rotation rate from low to high to realize change from three-dimensional growth to two-dimensional growth of the GaN structure layer before growth of the multiple quantum-well layer, in which, Si is doped at position approximate to the multiple quantum-well layer to form an undoped gradient GaN layer and an N-type gradient GaN layer; growing a multiple quantum-well layer, an Al x Ga 1-x N (0≦x≦1) layer and a P-type layer; and during later chip fabrication, dividing the epitaxial wafer over the etched N-type platform into chip grains and immersing them in chemical solutions for wet etching; and forming an inverted pyramid structure with rough side wall over the multiple quantum-well layer to improve light-emitting efficiency.
1. A method of fabricating a light-emitting diode, comprising:
providing a substrate;
growing over the substrate a low-temperature Al x Ga 1-x N (0≦x≦1) buffer layer, an undoped gradient GaN layer, an N-type gradient GaN layer, a multiple quantum-well layer, an Al x Ga 1-x N (0≦x≦1) electron blocking layer and a P-type layer;
wherein after growth of the buffer layer, set the growth pressure from high to low and temperature and rotation rate from low to high to realize change from three-dimensional growth to two-dimensional growth of the GaN structure layer before growth of the multiple quantum-well layer by changing critical layer thickness over the substrate surface and lateral and vertical growth rate and Si is doped at position proximal to the multiple quantum-well layer to form an undoped gradient GaN layer and an N-type gradient GaN layer with gradient growth mode; during later chip fabrication, dividing the epitaxial wafer over the etched N-type platform into chip grains and immersing them in chemical solutions for wet etching; and forming an inverted pyramid structure with rough side wall over the GaN structure layer to improve light-emitting efficiency.
2. The method of claim 1 , wherein during from-bottom-to-up growth of the GaN structure layer, pressure in the reaction chamber is changed from 600 torr to 100 torr and temperature and rotation rate from 700° C. to 1150° C. and from 600 rpm to 1200 rpm respectively.
3. The method of claim 1 , wherein during from-bottom-to-up growth of the GaN structure layer, the pressure, rotation rate and temperature appear liner or non-linear gradual change at the same time, i.e., the GaN structure layer is formed under gradient pressure, rotation rate and temperature environment.
4. The method of claim 1 , wherein during from-bottom-to-up growth of the GaN structure layer, only one or two of pressure, rotation rate and temperature appear(s) liner gradual change while other conditions keep stable.
5. The method of claim 1 , wherein during from-bottom-to-up growth of the GaN structure layer, only one or two of pressure, rotation rate and temperature appear(s) non-linear gradual change while other conditions keep stable.
6. The method of claim 1 , wherein during from-bottom-to-up growth of the GaN structure layer, Si is doped at position approximate to the multiple quantum-well layer to form an N-type gradient GaN layer, in which, thicknesses of the undoped gradient GaN layer and the N-type gradient GaN layer are a and b respectively, and total growth thickness of the GaN layer from three-dimensional growth to two-dimensional growth is c, wherein: 0≦a<c, 0<b≦c, and a+b=c.
7. The method of claim 1 , wherein during from-bottom-to-up growth of the GaN structure layer, some GaN layers can be replaced by Al x Ga 1-x N (0≦x≦1) or Al x In y Ga 1-x-y N (0≦x≦1, 0≦y≦1).
8. The method of claim 1 , wherein during chip fabrication, etch the side wall of the epitaxial layer to form an inverted pyramid structure with rough side wall.
9. The method of claim 1 , wherein the etched GaN structure layer has an inclined rough side with inclination angle of 0°-80°.
10. The method of claim 1 , wherein the epitaxial growth method is expanded to the multiple quantum-well layer or/and the P-type layer.
11. A light-emitting diode (LED) comprising:
a substrate;
sequentially grown over the substrate, a low-temperature Al x Ga 1-x N (0≦x≦1) buffer layer, an undoped gradient GaN layer, an N-type gradient GaN layer, a multiple quantum-well layer, an Al x Ga 1-x N (0≦x≦1) electron blocking layer and a P-type layer;
wherein after growth of the buffer layer, the growth pressure is set from high to low and temperature and rotation rate from low to high to realize change from three-dimensional growth to two-dimensional growth of the GaN structure layer before growth of the multiple quantum-well layer by changing critical layer thickness over the substrate surface and lateral and vertical growth rate and Si is doped at position proximal to the multiple quantum-well layer to form an undoped gradient GaN layer and an N-type gradient GaN layer with gradient growth mode; during later chip fabrication, dividing the epitaxial wafer over the etched N-type platform into chip grains and immersing them in chemical solutions for wet etching; and forming an inverted pyramid structure with rough side wall over the GaN structure layer to improve light-emitting efficiency.
12. The LED of claim 11 , wherein during from-bottom-to-up growth of the GaN structure layer, pressure in the reaction chamber is changed from 600 torr to 100 torr and temperature and rotation rate from 700° C. to 1150° C. and from 600 rpm to 1200 rpm respectively.
13. The LED of claim 11 , wherein during from-bottom-to-up growth of the GaN structure layer, the pressure, rotation rate and temperature appear liner or non-linear gradual change at the same time, i.e., the GaN structure layer is formed under gradient pressure, rotation rate and temperature environment.
14. The LED of claim 11 , wherein during from-bottom-to-up growth of the GaN structure layer, only one or two of pressure, rotation rate and temperature appear(s) liner gradual change while other conditions keep stable.
15. The LED of claim 11 , wherein during from-bottom-to-up growth of the GaN structure layer, only one or two of pressure, rotation rate and temperature appear(s) non-linear gradual change while other conditions keep stable.
16. The LED of claim 11 , wherein during from-bottom-to-up growth of the GaN structure layer, Si is doped at position approximate to the multiple quantum-well layer to form an N-type gradient GaN layer, in which, thicknesses of the undoped gradient GaN layer and the N-type gradient GaN layer are a and b respectively, and total growth thickness of the GaN layer from three-dimensional growth to two-dimensional growth is c, wherein: 0≦a<c, 0<b≦c, and a+b=c.
17. The LED of claim 11 , wherein during from-bottom-to-up growth of the GaN structure layer, some GaN layers can be replaced by Al x Ga 1-x N (0≦x≦1) or Al x In y Ga 1-x-y N (0≦x≦1, 0≦y≦1).
18. The LED of claim 11 , wherein during chip fabrication, etch the side wall of the epitaxial layer to form an inverted pyramid structure with rough side wall.
19. The LED of claim 11 , wherein the etched GaN structure layer has an inclined rough side with inclination angle of 0°-80°.
20. The LED of claim 11 , the multiple quantum-well layer or/and the P-type layer are grown with the same growth mode as the GaN structure.