Imprint template for patterned recording media
Provided herein is an apparatus including a rectangular array of rectangular protrusions in a first region corresponding to a data region; and a hexagonal array of circular protrusions in a second region corresponding to a servo region, wherein a first global protrusion density for the first region is greater than a second global protrusion density for the second region. Also provided herein is a method including forming a first template; forming a second template; and cross-imprinting the first template and the second template to form a third template corresponding to the foregoing apparatus.
1. An apparatus, comprising
a rectangular array of rectangular protrusions in a first region corresponding to a data region; and
a hexagonal array of circular protrusions in a second region corresponding to a servo region,
wherein a first global protrusion density for the first region is greater than a second global protrusion density for the second region.
2. The apparatus of claim 1 ,
wherein the rectangular array of rectangular protrusions comprises an arbitrary skew angle of more than about 8°.
3. The apparatus of claim 1 ,
wherein the rectangular protrusions comprise an arbitrary bit aspect ratio of at least about 1.
4. The apparatus of claim 1 ,
wherein the rectangular protrusions comprise an arbitrary bit aspect ratio of no more than about 4.
5. The apparatus of claim 1 ,
wherein the hexagonal array of circular protrusions is formed into one or more chevron-shaped features corresponding to burst patterns in the servo region.
6. The apparatus of claim 1 ,
wherein the hexagonal array of circular protrusions is formed into one or more line-shaped features corresponding to preamble patterns in the servo region.
7. The apparatus of claim 1 ,
wherein the apparatus is an imprint template for bit-patterned recording media, and
wherein the first and second regions respectively correspond to data and servo regions of the bit-patterned recording media.
8. A method, comprising
forming a first template;
forming a second template; and
cross-imprinting the first template and the second template to form a third template comprising
a rectangular array of rectangular protrusions in a first region of the third template corresponding to a data region and
a hexagonal array of circular protrusions in a second region of the third template corresponding to a servo region,
wherein a first global protrusion density for the first region is greater than a second global protrusion density for the second region.
9. The method of claim 8 ,
wherein forming the first template comprises forming circumferential lamellae by directed self-assembly of cylinder-forming block copolymers atop a graphoepitaxial pre-pattern in a first region of the first template corresponding to the first region of the third template.
10. The method of claim 9 ,
wherein forming the first template further comprises forming chevron-shaped features by directed self-assembly of sphere-forming block copolymers within a graphoepitaxial pre-pattern in a first portion of a second region of the first template corresponding to the second region of the third template.
11. The method of claim 10 ,
wherein forming the first template further comprises transferring the circumferential lamellae and the chevron-shaped features into an underlying hardmask or substrate.
12. The method of claim 11 ,
wherein forming the first template further comprises protecting one region of the first region and the second region before steps of directing self-assembly and transferring the other one region of the first region and the second region.
13. The method of claim 8 ,
wherein forming the second template comprises forming radial lamellae by directed self-assembly of cylinder-forming block copolymers atop a graphoepitaxial pre-pattern in a first region of the second template corresponding to the first region of the third template.
14. The method of claim 13 ,
wherein forming the second template comprises forming line-shaped features by directed self-assembly of sphere-forming block copolymers within a graphoepitaxial pre-pattern in a second portion of a second region of the second template corresponding to the second region of the third template.
15. The method of claim 14 ,
wherein forming the second template further comprises transferring the radial lamellae and the line-shaped features into an underlying hardmask or substrate.
16. The method of claim 15 ,
wherein forming the first template further comprises protecting one region of the first region and the second region before steps of directing self-assembly and transferring the other one region of the first region and the second region.
17. A method, comprising
cross-imprinting a first template and a second template to form a third template comprising
a rectangular array of rectangular protrusions in a first region of the third template corresponding to a data region and
a hexagonal array of circular protrusions in a second region of the third template corresponding to a servo region,
wherein a first global protrusion density for the first region is greater than a second global protrusion density for the second region.
18. The method of claim 17 ,
wherein the rectangular protrusions comprise an arbitrary bit aspect ratio of about 1-4.
19. The method of claim 17 ,
wherein the hexagonal array of circular protrusions is formed into one or more chevron-shaped features corresponding to burst patterns in the servo region, and
wherein the hexagonal array of circular protrusions is formed into one or more line-shaped features corresponding to preamble patterns in the servo region.
20. The method of claim 17 , further comprising
performing imprint lithography with the third template for subsequently producing a bit-patterned recording medium,
wherein the first and second regions respectively correspond to data and servo regions of the bit-patterned recording medium.