Thin-film transistor
View Patent ↗According to one embodiment, a thin-film transistor includes a polycrystalline semiconductor layer, a gate electrode opposing the polycrystalline semiconductor layer, a gate insulating film provided between the gate electrode and the polycrystalline semiconductor layer and in contact with the gate electrode, and an amorphous layer provided between the gate insulating film and the polycrystalline semiconductor layer, and in contact with the gate insulating film and the polycrystalline semiconductor layer.
1. A thin-film transistor comprising:
a polycrystalline semiconductor layer;
a gate electrode opposing the polycrystalline semiconductor layer;
a gate insulating film provided between the gate electrode and the polycrystalline semiconductor layer and in contact with the gate electrode; and
an amorphous layer provided between the gate insulating film and the polycrystalline semiconductor layer, and in contact with the gate insulating film and the polycrystalline semiconductor layer, wherein
the polycrystalline semiconductor layer comprises a source region, a drain region and a channel region provided between the source region and the drain region, and
the amorphous layer covers the channel region and exposes the source region and the drain region.
2. The thin-film transistor of claim 1 , further comprising first and second electrodes in contact with the polycrystalline semiconductor layer,
wherein
the first and second electrodes are separated from the amorphous layer.
3. The thin-film transistor of claim 1 , wherein
the amorphous layer is thinner than the polycrystalline semiconductor layer.
4. The thin-film transistor of claim 1 , wherein
the amorphous layer is an oxide semiconductor layer containing an oxide of at least one of indium, gallium, zinc and tin.
5. The thin-film transistor of claim 1 , wherein
the polycrystalline semiconductor layer is of polycrystalline silicon.
6. A thin-film transistor comprising:
an insulating substrate;
a polycrystalline semiconductor layer formed above a top surface of the insulating substrate;
an amorphous layer in contact with a top surface of the polycrystalline semiconductor layer;
an insulating film in contact with a top surface of the amorphous layer;
a gate electrode in contact with a top surface of the insulating film; and
first and second electrodes each in contact with the polycrystalline semiconductor, wherein
the insulating film is in contact with the top surface of the polycrystalline semiconductor layer, and
the first electrode and the second electrode are separated from the amorphous layer.
7. The thin-film transistor of claim 6 , wherein
the amorphous layer is thinner than the polycrystalline semiconductor layer.
8. The thin-film transistor of claim 6 , wherein
the amorphous layer is an oxide semiconductor layer containing an oxide of at least one of indium, gallium, zinc and tin.
9. The thin-film transistor of claim 6 , wherein
the polycrystalline semiconductor layer is of polycrystalline silicon.
10. A thin-film transistor comprising:
an insulating substrate;
a gate electrode formed above a top surface of the insulating substrate;
an insulating film in contact with a top surface of the gate electrode;
an amorphous layer in contact with a top surface of the insulating film;
a polycrystalline semiconductor layer in contact with a top surface of the amorphous layer; and
first and second electrodes each in contact with a top surface of the polycrystalline semiconductor layer, wherein
the polycrystalline semiconductor layer is in contact with the top surface of the insulating film.
11. The thin-film transistor of claim 10 , wherein
the amorphous layer is thinner than the polycrystalline semiconductor layer.
12. The thin-film transistor of claim 10 , wherein
the amorphous layer is an oxide semiconductor layer containing an oxide of at least one of indium, gallium, zinc and tin.
13. The thin-film transistor of claim 10 , wherein
the polycrystalline semiconductor layer is of polycrystalline silicon.