Magnetoresistive memory device and manufacturing method of the same
View Patent ↗According to one embodiment, a magnetoresistive memory device includes a magnetoresistive element of a stacked layer structure includes a first magnetic layer, a second magnetic layer, and a nonmagnetic layer between the first and second magnetic layers, and an insulating layer of a group III-V compound provided on a side of the first magnetic layer of the magnetoresistive element, the insulating layer including an chemical element of group II, group IV, or group VI.
1. A magnetoresistive memory device comprising:
a magnetoresistive element of a stacked layer structure comprising a first magnetic layer, a second magnetic layer, and a nonmagnetic layer between the first and second magnetic layers; and
an insulating layer of a group III-V compound provided on a side of the first magnetic layer of the magnetoresistive element, the insulating layer including an additional element from one of group II, group IV, and group VI.
2. The device of claim 1 , wherein:
the first magnetic layer is a storage layer in which a magnetization direction is variable;
the nonmagnetic layer is a tunnel barrier layer; and
the second magnetic layer is a reference layer in which a magnetization direction is fixed.
3. The device of claim 2 , further comprising a shift canceling layer which reduces a stray magnetic field caused by the reference layer, the shift canceling layer being provided on the reference layer, opposite to the storage layer.
4. The device of claim 1 , further comprising a conductive buffer layer provided on the insulating layer, opposite to the first magnetic layer.
5. The device of claim 1 , wherein the insulating layer includes the additional element at an end portion.
6. The device of claim 5 , wherein an end portion of the second magnetic layer is located at a more interior side than the end portion of the insulating layer.
7. The device of claim 1 , wherein the insulating layer is AIN, GaN, InN, MgO or SiN.
8. The device of claim 1 , wherein the additional element is at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, C, Si, Ge, Sn, S, Se, and Te.
9. The device of claim 1 , further comprising a substrate provided with a select transistor, and an electrode connected to one of a source and a drain of the select transistor, on a side of the insulating layer of the magnetoresistive element, wherein
the insulating layer is provided on the electrode, and the magnetoresistive element is provided on the insulating layer.