IP Library Granted Patent US 10,692,683
Granted Patent B2
US 10,692,683 · App. 15/702,647 · Granted Jun 23, 2020

Thermally assisted negative electron affinity photocathode

Inventors: Kenneth A. Costello (Union City, CA); Verle W. Aebi (Menlo Park, CA); Michael Jurkovic (San Ramon, CA); Xi Zeng (San Jose, CA)
Assignee: INTEVAC, INC.
H01J29/04H01J31/48H01J31/49H01J2231/501
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Quick Facts
Patent No.
US 10,692,683
App. No.
15/702,647
Granted
Jun 23, 2020
Kind
B2
Abstract

A novel photocathode employing a conduction band barrier is described. Incorporation of a barrier optimizes a trade-off between photoelectron transport efficiency and photoelectron escape probability. The barrier energy is designed to achieve a net increase in photocathode sensitivity over a specific operational temperature range.

Claims (31)

1. A passive, single electrical potential p-type semiconductor photocathode, comprising:

an optical window;

an optical absorber abutting the optical window;

a thermionic barrier layer abutting the optical absorber;

wherein the thermionic barrier layer has a conduction band barrier comprising a barrier in conduction band energy sufficient in barrier height and barrier thickness so that transmission of photoelectrons across the barrier in conduction band energy is dominated by thermally excited electrons with sufficient energy to exceed the barrier height as opposed to tunneling through the barrier in conduction band energy.

2. A photocathode in accordance with claim 1 , wherein the optical absorber is comprised of GaAs.

3. A photocathode in accordance with claim 2 , wherein the thermionic barrier layer is comprised of AlGaAs.

4. A photocathode in accordance with claim 3 where the thermionic barrier layer AlGaAs contains an Al/(Al+Ga) atomic percentage of between 0.1% and 4% Al.

5. A photocathode in accordance with claim 4 where the thermionic barrier layer AlGaAs contains an Al/(Al+Ga) atomic percentage of approximately 1.5% Al.

6. A photocathode in accordance with claim 1 , further comprising a surface chemistry specification layer abutting the thermionic barrier layer.

7. A photocathode in accordance with claim 6 , where the surface chemistry specification layer is comprised of GaAs.

8. A photocathode in accordance with claim 7 where the thermionic barrier layer is comprised of AlGaAs.

9. A photocathode in accordance with claim 8 where the thermionic barrier layer AlGaAs contains an Al/(Al+Ga) atomic percentage of between 0.1% and 4% Al.

10. A photocathode in accordance with claim 9 where the thermionic barrier layer AlGaAs contains an Al/(Al+Ga) atomic percentage of approximately 1.5% Al.

11. A photocathode in accordance with claim 6 , where the surface chemistry specification layer comprises an emission surface facing vacuum.

12. A photocathode in accordance with claim 6 where the surface chemistry specification layer thickness lies in the range of from one atomic layer to 30 nm.

13. A photocathode in accordance with claim 12 where the surface chemistry specification layer is comprised of GaAs.

14. A low-light sensor, comprising:

a vacuum enclosure;

a passive, single electrical potential p-type semiconductor photocathode positioned within the vacuum enclosure;

an electron receiving surface within the vacuum enclosure and facing the photocathode;

wherein the photocathode comprises:

an optical window;

an optical absorber abutting the optical window; and

a thermionic barrier layer abutting the optical absorber;

wherein the thermionic barrier layer has a conduction band barrier comprising a barrier in conduction band energy sufficient in barrier height and barrier thickness so that transmission of photoelectrons across the barrier in conduction band energy is dominated by thermally excited electrons with sufficient energy to exceed the barrier height as opposed to tunneling through the barrier in conduction band energy.

15. The low light sensor of claim 14 , wherein the electron receiving surface comprises an electron sensitive CMOS image sensor.

16. The low light sensor of claim 14 , wherein the electron receiving surface comprises an electron sensitive CCD image sensor.

17. The low light sensor of claim 14 , wherein the electron receiving surface comprises a surface of a microchannel plate.

18. The low light sensor of claim 14 , further comprising a microchannel plate electron receiving surface facing the photocathode with output of the microchannel plate facing a thin conductive layer overlaid on a phosphor layer on an output window.

19. The low light sensor of claim 14 , further comprising a microchannel plate electron receiving surface facing the photocathode with output of one or more stacked microchannel plates facing a thin conductive layer.

Assignments (9)
SECURITY INTEREST Recorded Oct 3, 2024
From: PHOTONICS WEST, LLC
To: KEYBANK NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 069110/0610 →
CORRECTIVE ASSIGNMENT TO CORRECT THE THE APPLICATION NUMBER INCORRECTLY LISTED AS PATENT NUMBER PREVIOUSLY RECORDED AT REEL: 68644 FRAME: 238. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Sep 26, 2024
From: EOTECH, LLC
To: PHOTONICS WEST, LLC
Reel/Frame 069057/0092 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 20, 2024
From: EOTECH, LLC
To: PHOTONICS WEST, LLC
Reel/Frame 068644/0238 →
SECURITY INTEREST Recorded Aug 11, 2023
From: EOTECH, LLC
To: KEYBANK NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 064571/0724 →
NOTICE OF RELEASE OF SECURITY INTEREST IN PATENT COLLATERAL Recorded Jul 21, 2023
From: BLUE TORCH FINANCE LLC, AS COLLATERAL AGENT
To: EOTECH, LLC; HEL TECHNOLOGIES, LLC
Reel/Frame 064356/0155 →
PATENT SECURITY AGREEMENT Recorded Apr 19, 2022
From: EOTECH, LLC
To: BLUE TORCH FINANCE LLC, AS ADMINISTRATIVE AGENT
Reel/Frame 059725/0564 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 10, 2022
From: INTEVAC, INC
To: EOTECH, LLC
Reel/Frame 058589/0494 →
PATENT SECURITY AGREEMENT Recorded Dec 30, 2021
From: EOTECH, LLC; HEL TECHNOLOGIES, LLC
To: BLUE TORCH FINANCE LLC
Reel/Frame 058600/0351 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 16, 2017
From: COSTELLO, KENNETH A.; AEBI, VERLE W.; JURKOVIC, MICHAEL; ZENG, XI
To: INTEVAC, INC.
Reel/Frame 044156/0276 →