Memory structure
View Patent ↗A memory structure including a substrate, a first transistor, a second transistor, and a trench capacitor is provided. The trench capacitor is disposed in the substrate and is connected between the first transistor and the second transistor.
1. A memory structure, comprising:
a substrate, wherein the substrate has a trench;
a first transistor and a second transistor; and
a trench capacitor disposed in the substrate and connected between the first transistor and the second transistor, wherein the trench capacitor comprises:
a first electrode disposed in the trench;
a second electrode disposed in the trench and located on the first electrode;
a first dielectric layer located between the first electrode and the substrate; and
a second dielectric layer located between the second electrode and the first electrode and between the second electrode and the substrate, wherein
the first dielectric layer is not present between an upper portion of the first electrode and the substrate.
2. The memory structure according to claim 1 , wherein the trench capacitor is completely located in the substrate.
3. The memory structure according to claim 1 , wherein the first transistor and the second transistor are one and the other of a P-type metal oxide semiconductor transistor and an N-type metal oxide semiconductor transistor, respectively.
4. The memory structure according to claim 1 , further comprising:
a capacitor located above the trench capacitor and electrically connected between the first transistor and the second transistor, wherein the capacitor is connected in parallel with the trench capacitor.
5. The memory structure according to claim 1 , further comprising:
a first doped region located in the substrate on one side of the trench and connected to the upper portion of the first electrode; and
a second doped region located in the substrate on another side of the trench and connected to the upper portion of the first electrode.
6. The memory structure according to claim 5 , wherein
the first transistor comprises:
a first gate disposed on the substrate and insulated from the substrate; and
a third doped region and a fourth doped region located in the substrate on two sides of the first gate, wherein the fourth doped region is connected to the first doped region, and
the second transistor comprises:
a second gate disposed on the substrate and insulated from the substrate; and
a fifth doped region and a sixth doped region located in the substrate on two sides of the second gate, wherein the fifth doped region is connected to the second doped region.
7. The memory structure according to claim 6 , wherein
the first transistor further comprises:
a first well region located in the substrate, wherein the third doped region and the fourth doped region are located in the first well region, and the second transistor further comprises:
a second well region located in the substrate, wherein the fifth doped region and the sixth doped region are located in the second well region.
8. The memory structure according to claim 6 , further comprising:
a capacitor located above the trench capacitor and comprising:
a third electrode electrically connected to the fourth doped region and the fifth doped region;
a fourth electrode disposed on the third electrode; and
an insulating layer disposed between the third electrode and the fourth electrode.
9. The memory structure according to claim 8 , wherein the first doped region and the fourth doped region are different conductive types, and the third electrode is electrically connected to both of the first doped region and the fourth doped region.