IP Library Granted Patent US 10,832,921
Granted Patent B2
US 10,832,921 · App. 16/424,046 · Granted Nov 10, 2020

Electronic device with top side pin array and manufacturing method thereof

Inventors: Devarajan Balaraman (Apex, NC); Daniel Richter (Goldsboro, NC); Greg Hames (Raleigh, NC); Dean Zehnder (Hillsborough, NC); Glenn Rinne (Apex, NC)
Assignee: AMKOR TECHNOLOGY, INC.
H01L21/4853H01L21/56H01L21/565H01L21/6835H01L23/3121H01L23/49811H01L23/3128H01L2221/68345H01L2221/68359H01L2224/131H01L2224/16227H01L2224/32225H01L2224/48091H01L2224/48137H01L2224/73204H01L2224/73265H01L2224/81005H01L2224/81203H01L2224/81815H01L2224/92125H01L2224/97H01L2924/1533H01L2924/181H01L2924/19041H01L2924/19042H01L2924/19043H01L2924/19105
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Quick Facts
Patent No.
US 10,832,921
App. No.
16/424,046
Granted
Nov 10, 2020
Kind
B2
Abstract

An electronic device and a manufacturing method thereof. As non-limiting examples, various aspects of this disclosure provide an electronic device having a top side pin array, for example which may be utilized for three-dimensional stacking, and a method for manufacturing such an electronic device.

Claims (63)

1. An electronic device comprising:

a lower redistribution structure comprising an upper surface and a lower surface, the upper surface comprising a conductive portion and a die-attach pad;

a semiconductor die attached and electrically coupled to the die-attach pad;

an upper redistribution structure comprising an upper surface and a lower surface, the lower surface comprising a conductive portion; and

a non-plated pin comprising:

a lower end attached to the conductive portion of the lower redistribution structure via a solder member; and

an upper end attached to the conductive portion of the upper redistribution structure.

2. The electronic device of claim 1 , wherein the solder member comprises a portion directly positioned between the lower end of the pin and the conductive portion of the lower redistribution structure.

3. The electronic device of claim 2 , wherein:

a width of an upper surface of the solder member is smaller than a width of the pin and leaves a space that is free of solder; and

the space is directly between a perimeter of the lower end of the pin and the conductive portion of the lower redistribution structure.

4. The electronic device of claim 1 , wherein the solder member comprises a fillet that rises up a portion of a lateral side of the pin.

5. The electronic device of claim 1 , wherein the pin comprises:

a lateral side between the upper end and the lower end of the pin; and

a rounded edge that directly joins the lower end of the pin to the lateral side of the pin, the rounded edge providing a curved transition between the lateral side of the pin and the lower end of the pin.

6. The electronic device of claim 1 , wherein:

the pin comprises a cylinder-shaped main body and a head at the lower end of the pin;

the main body has a body diameter; and

the head has a head diameter that is greater than the body diameter.

7. The electronic device of claim 1 , wherein:

the pin comprises a cylinder-shaped main body and a head at the upper end of the pin;

the main body has a body diameter; and

the head has a head diameter that is greater than the body diameter.

8. The electronic device of claim 1 , wherein the upper end of the pin is beveled.

9. The electronic device of claim 1 , wherein the lower end of the pin is beveled.

10. The electronic device of claim 1 , further comprising encapsulating material that encapsulates and directly contacts a lateral side of the pin;

wherein the upper end of the pin is coplanar with an upper surface of the encapsulating material.

11. The electronic device of claim 1 , wherein:

the upper redistribution structure comprises a dielectric layer having a lower surface; and

the lower surface of the conductive portion of the upper redistribution structure, the lower surface of the dielectric layer, and the lower surface of the upper redistribution structure are coplanar.

12. The electronic device of claim 11 , further comprising encapsulating material that encapsulates and directly contacts a lateral side of the pin, wherein:

the encapsulating material comprises an upper surface that is coplanar with the lower surface of the upper redistribution structure.

13. The electronic device of claim 1 , wherein a diameter of the pin is greater than a diameter of the conductive portion of the upper redistribution structure.

14. An electronic device comprising:

a lower redistribution structure comprising an upper surface and a lower surface, the upper surface comprising a conductive portion and a die-attach pad;

a semiconductor die attached and electrically coupled to the die-attach pad;

a pin comprising a lower end and an upper end, the lower end attached to the conductive portion of the lower redistribution structure via a conductive adhesive;

encapsulating material that encapsulates and directly contacts:

a lateral side of the pin; and

a lateral side of the semiconductor die; and

an upper redistribution structure comprising a conductive layer and a dielectric layer built on an upper surface of the encapsulating material such that:

a conductive portion of conductive layer is attached to an upper end of the pin; and

a lower surface of the dielectric layer, a lower surface of the upper redistribution structure, and a lower surface of the conductive layer are coplanar.

15. The electronic device of claim 14 , wherein:

the pin comprises a main body and a head at an end of the pin, the end selected from the upper end and the lower end of the pin;

the main body has a body diameter;

the head has a head diameter that is greater than the body diameter; and

an end of the pin, that is opposite the head, is beveled.

16. The electronic device of claim 14 , wherein a diameter of the pin is greater than a diameter of the conductive portion of the upper redistribution structure.

17. An electronic device comprising:

a lower redistribution structure comprising an upper surface and a lower surface, the upper surface comprising a conductive portion and a die-attach pad;

a semiconductor die attached and electrically coupled to the die-attach pad;

an upper redistribution structure comprising an upper surface and a lower surface, the lower surface comprising a conductive portion; and

a pin attached to:

the conductive portion of the lower redistribution structure via a solder member; and

the conductive portion of the upper redistribution structure;

wherein the pin comprises a first end, a second end, a main body that extends from the first end to the second end, and a head at the first end; and

wherein the head of the pin has a greater diameter than the main body of the first pin.

18. The electronic device of claim 17 , wherein the second end of the pin is beveled.

19. The electronic device of claim 17 , further comprising encapsulating material that encapsulates and directly contacts:

a lateral side of the pin; and

a surface of the semiconductor die.

20. The electronic device of claim 17 , wherein a diameter of the pin is greater than a diameter of the conductive portion of the upper redistribution structure.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 19, 2020
From: AMKOR TECHNOLOGY, INC.
To: AMKOR TECHNOLOGY SINGAPORE HOLDING PTE. LTD.
Reel/Frame 054482/0302 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 28, 2019
From: BALARAMAN, DEVARAJAN; RICHTER, DANIEL; HAMES, GREG; ZEHNDER, DEAN; RINNE, GLENN
To: AMKOR TECHNOLOGY, INC.
Reel/Frame 049296/0477 →