IP Library Granted Patent US 10,840,385
Granted Patent B1
US 10,840,385 · App. 16/777,928 · Granted Nov 17, 2020

Performance SiC Schottky diodes

Inventors: Siddarth Sundaresan (Dulles, VA); Ranbir Singh (Dulles, VA); Jaehoon Park (Dulles, VA)
Assignee: GeneSiC Semiconductor Inc.
H01L29/872H01L21/0465H01L21/0495H01L29/1608H01L29/36H01L29/47H01L29/6606
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Quick Facts
Patent No.
US 10,840,385
App. No.
16/777,928
Granted
Nov 17, 2020
Kind
B1
Abstract

An embodiment relates to a semiconductor component, comprising a semiconductor body of a first conduction type comprising a voltage blocking layer; and islands of a second conductivity type on a contact surface; and a metal layer on the voltage blocking layer, wherein the metal layer and the voltage blocking layer includes a Schottky contact, and a first conductivity type layer comprising the first conduction type not in contact with the Schottky contact that is interspersed between the islands of the second conductivity type.

Claims (19)

1. A semiconductor component, comprising a semiconductor body of a first conduction type comprising a voltage blocking layer; and islands of a second conductivity type on a contact surface; and a metal layer on the voltage blocking layer, wherein the metal layer and the voltage blocking layer includes a Schottky contact, and a first conductivity type layer comprising the first conduction type not in contact with the Schottky contact that is interspersed between the islands of the second conductivity type.

2. The semiconductor component of claim 1 , wherein a vertical extent of the first conductivity type layer is lower than a bottom of the islands of the second conductivity type.

3. The semiconductor component of claim 1 , wherein a vertical extent of the first conductivity type layer is higher than a bottom of the islands of the second conductivity type.

4. The semiconductor component of claim 1 , wherein a doping concentration within the first conductivity type layer is non-uniform in a direction that is perpendicular to the Schottky contact.

5. The semiconductor component of claim 1 , wherein a vertical extent of the first conductivity type layer is higher or lower than a bottom of the islands of the second conductivity type.

6. The semiconductor component of claim 1 , wherein the first conductivity type layer has a doping concentration that does not vary in any direction along the contact surface.

7. The semiconductor component of claim 1 , wherein the first conductivity type layer has a first doping concentration that is higher than a second doping concentration of a drift region.

8. The semiconductor component of claim 1 , wherein the first conductivity type layer has a first doping concentration that is lower than a second doping concentration of a drift region.

9. The semiconductor component of claim 1 , wherein the Schottky contact comprises a metal comprising Al, Ag, Au, Mo, Ni, Ti, W, Ti x W y , Ti x N y , or combinations thereof.

10. A diode comprising P+ islands interspersed within a N+ region and a N− region contacts with a Schottky layer.

11. The diode of claim 10 , wherein a vertical extent of the N+ region is lower than a bottom of the P+ islands.

12. The diode of claim 10 , wherein a vertical extent of the N+ region is higher than a bottom of the P+ islands.

13. The diode of claim 10 , wherein a doping concentration within the N+ region is non-uniform in a direction that is perpendicular to the Schottky layer.

14. The diode of claim 10 , wherein a vertical extent of the N+ region is higher or lower than a bottom of the P+ islands.

15. A diode comprising N+ islands interspersed within a P+ region and a P− region contacts with a Schottky layer.

16. The diode of claim 15 , wherein a vertical extent of the P+ region is lower than a bottom of the N+ islands.

17. The diode of claim 15 , wherein a vertical extent of the P+ region is higher than a bottom of the N+ islands.

18. The diode of claim 15 , wherein a doping concentration within the P+ region is non-uniform in a direction that is perpendicular to the Schottky layer.

19. The diode of claim 15 , wherein a vertical extent of the P+ region is higher or lower than a bottom of the N+ islands.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 31, 2020
From: SUNDARESAN, SIDDARTH; SINGH, RANBIR; PARK, JAEHOON
To: GENESIC SEMICONDUCTOR INC.
Reel/Frame 051679/0223 →
Cited By (2)
US 12,426,285 US 12,635,202