Composite component made of optical components, method for producing a composite component and device comprising an optical component
A composite component, a device, and method for producing the composite component including a plurality of optical components, a removable sacrificial layer, a retaining structure and a common intermediate carrier are provided, wherein the optical components each have an optical element for shaping a light beam and the sacrificial layer is arranged in the vertical direction at least in places between the intermediate carrier and the optical components. The retaining structure includes retaining elements, wherein the retaining structure and the sacrificial layer form a mechanical connection between the intermediate carrier and the optical components. The optical components are mechanically connected to the intermediate carrier only via the retaining structure, wherein the retaining elements are formed in such a way that under mechanical load they release the optical components so that the optical components are formed to be detachable from the intermediate carrier and thus transferable.
1. A method of producing a plurality of transferable optical components on a common intermediate carrier, wherein the optical components are configured to shape a light beam and wherein a retaining structure having a plurality of retaining elements forms a mechanical connection between the intermediate carrier and the optical components, comprising:
attaching or forming a plurality of optical components on the intermediate carrier, wherein a sacrificial layer is arranged in the vertical direction at least in places between the intermediate carrier and the optical components; and
removing the sacrificial layer, as a result of which the optical components are mechanically connected to the intermediate carrier only via the retaining structure, wherein the retaining elements release the optical components under mechanical load, so that the optical components are formed to be detachable from the intermediate carrier and thus transferable,
wherein the method is further configured for producing a plurality of devices,
wherein the retaining elements release the optical components under mechanical load so that the optical components are detached from the intermediate carrier by breaking the retaining elements and/or by detaching the retaining elements from the optical components, and
wherein the released components are printed on a plurality of main bodies of the devices, each of the main bodies comprising a semiconductor body having an active zone configured to generate or detect electromagnetic radiation,
wherein the optical components each have a transparent base body and the transparent base body contains photonic crystals which form the optical element of the optical component.
2. A composite component having a plurality of optical components, a removable sacrificial layer, a retaining structure and a common intermediate carrier, wherein
the optical components each comprise an optical element for shaping a light beam,
the sacrificial layer is arranged vertically at least in places between the intermediate carrier and the optical components,
the retaining structure comprises a plurality of retaining elements, wherein the retaining structure and the sacrificial layer form a mechanical connection between the intermediate carrier and the optical components, and
without the sacrificial layer, the optical components are mechanically connected to the intermediate carrier only via the retaining structure, wherein the retaining elements are formed in such a way that under mechanical load they release the optical components, so that the optical components are formed to be detachable from the intermediate carrier and thus transferable,
the optical components each have a transparent base body, and
wherein the transparent base body contains photonic crystals which form the optical element of the respective component.
3. The composite component according to claim 2 ,
wherein the optical element of the respective component is embedded in the associated transparent base body.
4. The composite component according to claim 3 ,
wherein the component has a planar rear side facing the intermediate carrier and an at least flat front side facing away from the intermediate carrier.
5. The composite component according to claim 2 ,
wherein the optical element of the respective component is formed by an optical layer which is arranged on the associated transparent base body.
6. The composite component according to claim 2 ,
wherein the retaining elements comprise retaining tethers which are located sidewards to the optical components and are formed to be breakable or detachable under mechanical load when the optical components are removed.
7. The composite component according to claim 2 ,
wherein the retaining elements comprise retaining columns which are located below the optical components, are arranged in the vertical direction exclusively between the intermediate carrier and the optical components and are formed to be breakable or detachable under mechanical load when the optical components are removed.
8. The composite component according to claim 2 ,
wherein the retaining elements are formed with respect to their geometry and/or material composition in such a way that they are formed to be breakable when the associated optical component is pressed or removed.
9. The composite component according to claim 2 , wherein
the sacrificial layer forms a common boundary layer between the intermediate carrier and the optical components, and
without the sacrificial layer, a cavity is formed between the intermediate carrier and the optical components or between the optical components, wherein the retaining elements are directly adjacent to the cavity in places or are arranged in the cavity.
10. A method for producing one or a plurality of devices comprising:
providing the composite component according to claim 2 ;
removing the sacrificial layer;
removing one or a plurality of optical components using a stamp or a plurality of stamps, wherein the retaining elements release the optical components under mechanical load of the stamp or stamps so that the optical components are detached from the intermediate carrier;
printing the component or the plurality of components on a main body of the device or on a plurality of main bodies of the devices, wherein the main body comprises a semiconductor body having an active zone configured to generate or detect electromagnetic radiation; and
separating the stamp or stamps from the optical component or components.
11. The method according to claim 10 ,
wherein the optical component is fixed to the associated main body of the device by a connection layer.
12. The method according to claim 10 ,
wherein the optical component and its associated main body each have a planar surface and are mechanically connected to one another at the planar surfaces using a direct bonding process.
13. A device comprising a main body and an optical component, wherein
the main body comprises a semiconductor body having an active zone configured for generating or detecting electromagnetic radiation,
the optical component has an optical element for shaping a light beam,
the optical component is printed on the main body and contains mechanical traces of detached or broken retaining elements,
the optical component has a transparent base body,
the optical element is arranged on the transparent base body, or is embedded or buried in the transparent base body,
an entire front side of the main body is planar,
an entire rear side of the optical component is planar, and
wherein the front side of the main body and the rear side of the optical component are directly adjacent to one another and form a mechanical connection based on van-der-Waals interactions between the optical component and the main body.
14. The device according to claim 13 ,
wherein the main body is a surface emitting laser diode and the optical component is configured to shape a light beam generated during operation of the laser diode.
15. The device according to claim 13 , wherein the transparent base body contains photonic crystals which form the optical element of the optical component.