IP Library Granted Patent US 4,131,487
Granted Patent Utility
US 4,131,487 · App. 05/846,222

Gettering semiconductor wafers with a high energy laser beam

Inventors: Charles Walter Pearce, Vincent Joseph Zaleckas
Patented Case View Patent ↗
Granted: Dec 26, 1978 Filed: Oct 26, 1977
Inventors
Charles Walter Pearce
Vincent Joseph Zaleckas
Assignee (at issue)
Western Electric Company, Inc.

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Quick Facts
Patent No.
US 4,131,487
App. No.
05/846,222
Filed
1977-10-26
Granted
1978-12-26
Kind
A