Granted Patent
Utility
US 4,134,514 · App. 05/746,923
Liquid source material container and method of use for semiconductor device manufacturing
Inventors:
John C. Schumacher, Andre Lagendijk
Patented Case
View Patent ↗
Granted: Jan 16, 1979
Filed: Dec 2, 1976
Inventors
John C. Schumacher
Andre Lagendijk
Assignee (at issue)
J.C. Schumacher Co.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.