Granted Patent
Utility
US 4,198,261 · App. 05/857,384
Method for end point detection during plasma etching
Inventors:
Heinz H. Busta, Robert E. Lajos, Kul B. Bhasin
Patented Case
View Patent ↗
Granted: Apr 15, 1980
Filed: Dec 5, 1977
Inventors
Heinz H. Busta
Robert E. Lajos
Kul B. Bhasin
Assignee (at issue)
Gould Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.