IP Library › Granted Patent US 4,208,240
Granted Patent Utility
US 4,208,240 · App. 06/006,627

Method and apparatus for controlling plasma etching

Inventor: Thomas S. Latos
Patented Case View Patent ↗
Granted: Jun 17, 1980 Filed: Jan 26, 1979
Inventor
Thomas S. Latos
Assignee (at issue)
Gould Inc.

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Quick Facts
Patent No.
US 4,208,240
App. No.
06/006,627
Filed
1979-01-26
Granted
1980-06-17
Kind
A