Granted Patent
Utility
US 4,235,191 · App. 06/016,685
Apparatus for depositing materials on stacked semiconductor wafers
Inventor:
Werner F. Esseluhn
Patented Case
View Patent ↗
Granted: Nov 25, 1980
Filed: Mar 2, 1979
Inventor
Werner F. Esseluhn
Assignee (at issue)
Western Electric Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.