Granted Patent
Utility
US 4,238,525 · App. 05/960,895
Method and apparatus for vacuum depositing thin coatings using electron beams
Inventors:
Hans Aichert, Walter Dietrich, Friedrich Stark, Herbert Stephan
Patented Case
View Patent ↗
Granted: Dec 9, 1980
Filed: Nov 15, 1978
Inventors
Hans Aichert
Walter Dietrich
Friedrich Stark
Herbert Stephan
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.