IP Library Granted Patent US 4,238,706
Granted Patent Utility
US 4,238,706 · App. 05/966,621

Soft x-ray source and method for manufacturing the same

Inventors: Hideo Yoshihara, Mikiho Kiuchi, Satoshi Nakayama, Toa Hayasaka, Junji Matsui
Patented Case View Patent ↗
Granted: Dec 9, 1980 Filed: Dec 5, 1978
Inventors
Hideo Yoshihara
Mikiho Kiuchi
Satoshi Nakayama
Toa Hayasaka
Junji Matsui
Assignee (at issue)
NIPPON ELECTRIC CO., LTD.

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Quick Facts
Patent No.
US 4,238,706
App. No.
05/966,621
Filed
1978-12-05
Granted
1980-12-09
Kind
A