Granted Patent
Utility
US 4,239,788 · App. 06/049,003
Method for the production of semiconductor devices using electron beam delineation
Inventor:
William A. Beck
Patented Case
View Patent ↗
Granted: Dec 16, 1980
Filed: Jun 15, 1979
Inventor
William A. Beck
Assignee (at issue)
LOCKHEED MARTIN CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.