IP Library › Granted Patent US 4,253,907
Granted Patent Utility
US 4,253,907 · App. 06/024,805

Anisotropic plasma etching

Inventors: Peter D. Parry, Leslie G. Jerde
Patented Case View Patent ↗
Granted: Mar 3, 1981 Filed: Mar 28, 1979
Inventors
Peter D. Parry
Leslie G. Jerde
Assignee (at issue)
Western Electric Company, Inc.

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Quick Facts
Patent No.
US 4,253,907
App. No.
06/024,805
Filed
1979-03-28
Granted
1981-03-03
Kind
A