Granted Patent
Utility
US 4,256,535 · App. 06/100,622
Method of polishing a semiconductor wafer
Inventor:
Edward L. Banks
Patented Case
View Patent ↗
Granted: Mar 17, 1981
Filed: Dec 5, 1979
Inventor
Edward L. Banks
Assignee (at issue)
Western Electric Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.