Granted Patent
Utility
US 4,264,393 · App. 05/847,349
Reactor apparatus for plasma etching or deposition
Inventors:
Georges J. Gorin, Paul C. Lindsey, Jr.
Patented Case
View Patent ↗
Granted: Apr 28, 1981
Filed: Oct 31, 1977
Inventors
Georges J. Gorin
Paul C. Lindsey, Jr.
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.