Granted Patent
Utility
US 4,267,205 · App. 06/066,606
Process for low-temperature surface layer oxidation of a semiconductor substrate
Inventors:
Ricardo C. Pastor, Remedios K. Chew, Luisa E. Gorre
Patented Case
View Patent ↗
Granted: May 12, 1981
Filed: Aug 15, 1979
Inventors
Ricardo C. Pastor
Remedios K. Chew
Luisa E. Gorre
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.