Granted Patent
Utility
US 4,268,538 · App. 06/024,989
High-pressure, high-temperature gaseous chemical method for silicon oxidation
Inventors:
Monte M. Toole, Raphael Klein
Patented Case
View Patent ↗
Granted: May 19, 1981
Filed: Mar 29, 1979
Inventors
Monte M. Toole
Raphael Klein
Assignee (at issue)
Atomel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.